International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Dec 14, 2022 - Dec 16, 2022
Fukuoka International Congress Center

1:20 PM - 1:40 PM

[OLED2-2] Ultra-Thin-Encapsulation Layers Fabrication for High-Resolution OLEDs Realized by a Showerhead-Type Initiated CVD and Plasma Enhanced Atomic Layer Deposition Hybrid System

*Byeong Gyu Roh1, Hun Hoe Heo1, Seung Chul Park1, Ji Ho Baek1, Sung Gap Im2, Ji Hye Kim3, Seong Jun Jeong3, Hyung Sang Park3 (1.LG Display (Korea), 2.KAIST (Korea), 3.iSAC Research Inc. (Korea))

iCVD, PEALD, Ultra-Thin-Encapsulation, AR/VR, High-Resolution OLED

https://doi.org/10.36463/idw.2022.0438

We developed a high-performance encapsulation layer for the fabrication of high-resolution OLEDs with UTE(Ultra-Thin-Encapsulation) structure. The UTE structure was achieved by sequential deposition of organic/inorganic layers by iCVD(initiated Chemical Vapor Deposition) and PEALD(Plasma Enhanced Atomic Layer Deposition) processes in a one-chamber system capable of depositing iCVD and PEALD layers. The basic thin film characteristics were investigated systematically. Especially, cross-section analysis clearly illustrated the excellent conformal coverage...