International Display Workshops General Incorporated Association

Proceedings of the International Display Workshops Volume 29 (IDW '22)

Proceedings of the International Display Workshops Volume 29 (IDW '22)

2022年12月14日 〜 2022年12月16日
Fukuoka International Congress Center

13:20 〜 13:40

[OLED2-2] Ultra-Thin-Encapsulation Layers Fabrication for High-Resolution OLEDs Realized by a Showerhead-Type Initiated CVD and Plasma Enhanced Atomic Layer Deposition Hybrid System

*Byeong Gyu Roh1、Hun Hoe Heo1、Seung Chul Park1、Ji Ho Baek1、Sung Gap Im2、Ji Hye Kim3、Seong Jun Jeong3、Hyung Sang Park3 (1.LG Display (Korea)、2.KAIST (Korea)、3.iSAC Research Inc. (Korea))

iCVD, PEALD, Ultra-Thin-Encapsulation, AR/VR, High-Resolution OLED

https://doi.org/10.36463/idw.2022.0438

We developed a high-performance encapsulation layer for the fabrication of high-resolution OLEDs with UTE(Ultra-Thin-Encapsulation) structure. The UTE structure was achieved by sequential deposition of organic/inorganic layers by iCVD(initiated Chemical Vapor Deposition) and PEALD(Plasma Enhanced Atomic Layer Deposition) processes in a one-chamber system capable of depositing iCVD and PEALD layers. The basic thin film characteristics were investigated systematically. Especially, cross-section analysis clearly illustrated the excellent conformal coverage...