[TILA-LIC8-01(Invited)] Surface Activated Bonding for 3D and Heterogenous Integration at Room Temperature
OPTICS & PHOTONICS International Congress 2024
|Fri. Apr 26, 2024
Bonding Technology & ATLA Project - 3
Session Chair: Hideki ISHIZUKI (RIKEN SPring-8 Center, Sayo-gun, Japan)
Fri. Apr 26, 2024 9:00 AM - 10:30 AM |315(Pacifico Yokohama Conference Center)