OPTICS & PHOTONICS International Congress

4505 results (1621 - 1630)

[OPTMp-07] Phase-shifting interferometry measure stress of HfO2/SiO2 anti-reflector multi-layer deposited with ion-assisted deposition

*Hao-Wei Kao1, Hsi-Chao Chen1,2, Sheng-Bin Chen1, Tan-Fu Liu2, Bo-Huei Liao3, Sheng-De Wong3, Yang-Chi Wang1 (1. Department of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan, 2. Graduate School of Electronic Engineering, National Yunlin University of Science and Technology, Douliu, Taiwan, 3. Taiwan Instrument Research Institute, National Applied Research Laboratories, Hsinchu 300092, Taiwan)

OPTICS & PHOTONICS International Congress 2023 |PDF Download

OPTM Poster Session

Wed. Apr 19, 2023 10:30 AM - 12:00 PM |Hall A(Pacifico Yokohama Exhibition Hall)

4505 results (1621 - 1630)