The Japan Society of Applied Physics

1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2, 1974 - Sep 3, 1974
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B2-2] A Novel Planar Multilevel Interconnection Technology Utilizing Polyimide

SEIKI HARADA, KIKUJI SATO, ATSUSHI SAIKI, TAKESHI KIMURA TOSHIO OKUBO, KIICHIRO MUKAI (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1974.B2-2