The Japan Society of Applied Physics

1974 Conference on Solid State Devices

1974 Conference on Solid State Devices

Sep 2, 1974 - Sep 3, 1974
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B2-3] IPOS Scheme : A New Isolation Technique for Integrated Circuits

S. Nakajima, Y. Watanabe, T. Yokoyama, K. Kato (1.Musashino Electrical Communication Laboratory Nippon Telegraph and Telephone Public Corporation)

https://doi.org/10.7567/SSDM.1974.B2-3