[A-2-1] Semi-Insulating Polycrystalline-Silicon (SIPOS) Passivation Technology T. Matsushita, T. Aoki, T. Otsu, H. Yamoto, H. Hayashi, M. Okayama, Y. Kawana (1.SONY Corporation, Atsugi Plant) https://doi.org/10.7567/SSDM.1975.A-2-1