[A-7-3] Effects of Crystalline Defects on Electrical Properties in Silicon Films on Sapphire
S. Onga、T. Yoshii、K. Hatanaka、Y. Yasuda
(1.Toshiba R and D Center, Tokyo Shibaura Electric Co., Ltd.、2.Faculty of Science, Gakushuin University)
https://doi.org/10.7567/SSDM.1975.A-7-3