[A-7-3] Effects of Crystalline Defects on Electrical Properties in Silicon Films on Sapphire

S. Onga, T. Yoshii, K. Hatanaka, Y. Yasuda (1.Toshiba R and D Center, Tokyo Shibaura Electric Co., Ltd., 2.Faculty of Science, Gakushuin University)

https://doi.org/10.7567/SSDM.1975.A-7-3