[C-3-2] A New Isolation Technique for SOS/LSIs -- Local Buried Oxide Isolation of SOS (LOBOS) -- Yoshio Sakai, Ryoichi Hori, Kikuo Dota, Masaharu Kubo (1.Central Research Laboratory, Hitachi Ltd.) https://doi.org/10.7567/SSDM.1976.C-3-2
