[A-1-7] X-RAY LITHOGRAPHY

Henry I. Smith (1.Lincoln Laboratory, Massachusetts Institute of Technology)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-8] New Application of Se-Ge Glasses to Silicon Microfabrication Technology

A. Yoshikawa、H. Nagai、Y. Mizushima (1.Musashino Electrical Communication Laboratory, Nippon Telegraph and Telephone Public Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[A-1-9] Glass Flow Mechanism of Phosphosilicate Glass and its Application to MOS Devices

N. Hashimoto、Y. Yatsuda、S. Mutoh (1.Central Research Laboratory, Hitachi Ltd.)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-1] Recent Developments in Microwave Devices

K W Gray (1.Royal Signals and Radar Establishment)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-2] Submillimeter Wave Si P+-P-N+ IMPATT Diodes

Masayuki Ino、Tadao Ishibashi、Masamichi Ohmori (1.Musashino Electrical Communication Laboratories, Nippon Telegraph and Telephone Public Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-3] High Power, High reliability p-n Junction GaAs Impatt Diodes for J-Band

S. Mitsui、K. Nishitani、O. Ishihara、H. Sawano、H. Miki (1.Central Research Laboratory, Mitsubishi Electric Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-4] Formation of Silicon P+πPNμN+ structure by Epitaxial Growth

K. Takahashi、S. Takamiya、S. Mitsui、H. Miki (1.Mitsubishi Electric Corporation, Central Research Laboratories)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-5] GaxIn1-xSb GUNN DIODES

K. Segawa、M. Otsubo、H. Miki、K. Shirahata、K. Fujibayashi (1.Central Research Laboratory, Manufacturing Development Laboratory, Mitsubishi Electric Corporation)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-6] Improvement of Planar GaAs Devices by Controlling the Properties of the Epilayer and the Epilayer - Substrate Interface

L. M. F. Kaufmann、K. Heime (1.University of Duisburg, Semiconductor Electronics Laboratory)

1976 International Conference on Solid State Devices |PDF ダウンロード

[B-1-7] Sub-Micron Gate GaAs MESFETs with Ion-Implanted Channels

T. Nozaki、K. Ohata (1.Central Research Laboratories, Nippon Electric Company Ltd.)

1976 International Conference on Solid State Devices |PDF ダウンロード