The Japan Society of Applied Physics

1977 Conference on Solid State Devices

1977 Conference on Solid State Devices

Aug 30, 1977 - Aug 31, 1977
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[B-6-3] Quantitative In-depth Profile of Passivated Oxide Layers of GaAs by AES-SIMS - a Comparison of Thermal, Anodic and Plasma Oxidation

K. Watanabe, M. Hashiba, T. Yamashina (1.Department of Nuclear Engineering, Faculty of Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1977.B-6-3