[A-6-2] Direct Electron Beam Data Writing Technology for 128K EB-ROM E. Arai、T. Ogawa、N. Ieda、K. Kiuchi、K. Iwadate、K. Takeya (1.Musashino Electrical Communication Laboratory, NTT) https://doi.org/10.7567/SSDM.1978.A-6-2