[A-6-2] Direct Electron Beam Data Writing Technology for 128K EB-ROM E. Arai, T. Ogawa, N. Ieda, K. Kiuchi, K. Iwadate, K. Takeya (1.Musashino Electrical Communication Laboratory, NTT) https://doi.org/10.7567/SSDM.1978.A-6-2