The Japan Society of Applied Physics

[A-1-7] Low-frequency Low-noise Transistors Fabricated by Double Ion Implantation

K. Yagi, M. Tamura, Y. Yanagi, K. Inaniwa, T. Tokuyama (1.Central Reseach Laboratory, 2.Hitachi Ltd. Takasaki Works, 3.Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1979.A-1-7