Silicon Graphoepitaxy

Michael W. GEIS; Dale C. FLANDERS; Donald J. SILVERSMITH; Dimitri A. ANTONIADIS; Henry I. SMITH

doi:https://doi.org/10.7567/SSDM.1980.A-2-2

1980 Conference on Solid State Devices

1980年8月26日〜 1980年8月27日
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-2-2] Silicon Graphoepitaxy

Michael W. GEIS、Dale C. FLANDERS、Donald J. SILVERSMITH、Dimitri A. ANTONIADIS、Henry I. SMITH (1.Lincoln Laboratory, Massachusetts Institute of Technology)

https://doi.org/10.7567/SSDM.1980.A-2-2

▲