High Speed MoSi2 gate CMOS/SOS Devices

Yoshihisa MIZUTANI; Kenji MAEGUCHI; Tohru MOCHIZUKI Minoru KIMURA; Mitsuo ISOBE; Yukimasa UCHIDA; Hiroyuki TANGO

doi:https://doi.org/10.7567/SSDM.1980.A-4-1

1980 Conference on Solid State Devices

Aug 26, 1980 - Aug 27, 1980
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-1] High Speed MoSi2 gate CMOS/SOS Devices

Yoshihisa MIZUTANI, Kenji MAEGUCHI, Tohru MOCHIZUKI Minoru KIMURA, Mitsuo ISOBE, Yukimasa UCHIDA, Hiroyuki TANGO (1.Semiconductor Device Engineering Laboratory TOSHIBA CORPORATION)

https://doi.org/10.7567/SSDM.1980.A-4-1

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