High Speed MoSi2 gate CMOS/SOS Devices

Yoshihisa MIZUTANI; Kenji MAEGUCHI; Tohru MOCHIZUKI Minoru KIMURA; Mitsuo ISOBE; Yukimasa UCHIDA; Hiroyuki TANGO

doi:https://doi.org/10.7567/SSDM.1980.A-4-1

1980 Conference on Solid State Devices

1980年8月26日〜 1980年8月27日
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-1] High Speed MoSi2 gate CMOS/SOS Devices

Yoshihisa MIZUTANI、Kenji MAEGUCHI、Tohru MOCHIZUKI Minoru KIMURA、Mitsuo ISOBE、Yukimasa UCHIDA、Hiroyuki TANGO (1.Semiconductor Device Engineering Laboratory TOSHIBA CORPORATION)

https://doi.org/10.7567/SSDM.1980.A-4-1

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