IMPROVEMENT OF SOS DEVICE PERFORMANCE BY SOLID-PHASE EPITAXY

Toshio YOSHII; Shinji TAGUCHI; Tomoyasu INOUE; Hiroyuki TANGO

doi:https://doi.org/10.7567/SSDM.1981.A-4-3

1981 Conference on Solid State Devices

1981年8月26日〜 1981年8月27日
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

[A-4-3] IMPROVEMENT OF SOS DEVICE PERFORMANCE BY SOLID-PHASE EPITAXY

Toshio YOSHII、Shinji TAGUCHI、Tomoyasu INOUE、Hiroyuki TANGO (1.Toshiba R and D Center, Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)

https://doi.org/10.7567/SSDM.1981.A-4-3

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