[A-4-3] IMPROVEMENT OF SOS DEVICE PERFORMANCE BY SOLID-PHASE EPITAXY

Toshio YOSHII, Shinji TAGUCHI, Tomoyasu INOUE, Hiroyuki TANGO (1.Toshiba R and D Center, Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)

https://doi.org/10.7567/SSDM.1981.A-4-3