[A-6-8] Evaluation and Control of Grain Boundaries in Laser-Recrystallized Polysilicon Island for Device Fabrication
T. Nishimura、A. Ishizu、Y. Akasaka
(1.LSI Research and Development Laboratory, Mitsubishi Electric Corporation、2.Materials Research Laboratory, Mitsubishi Electric Corporation)
https://doi.org/10.7567/SSDM.1982.A-6-8