[B-3-3] A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET)

Ken YAMAGUCHI, Yasuhiro SHIRAKI, Yoshifumi KATAYAMA, Yoshimasa MURAYAMA (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1982.B-3-3