[B-3-3] A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET) Ken YAMAGUCHI、Yasuhiro SHIRAKI、Yoshifumi KATAYAMA、Yoshimasa MURAYAMA (1.Central Research Laboratory, Hitachi, Ltd.) https://doi.org/10.7567/SSDM.1982.B-3-3