[B-3-3] A New Short Channel MOSFET with an Atomic-Layer-Doped Impurity-Profile (ALD-MOSFET)
Ken YAMAGUCHI, Yasuhiro SHIRAKI, Yoshifumi KATAYAMA, Yoshimasa MURAYAMA
(1.Central Research Laboratory, Hitachi, Ltd.)
https://doi.org/10.7567/SSDM.1982.B-3-3