[A-2-6] Effects of Encapsulation Layers on Planarization of Laser Recrystallized SOI Layers

M. Ohkura、K. Kusukawa、I. Yoshida、M. Miyao、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1983.A-2-6