[A-6-1] Tungsten Gate Electrode and Interconnect for MOS VLSIs

N. Yamamoto, S. Iwata, N. Kobayashi, T. Terada (1.Central Research Laboratory, Hitachi, Ltd., 2.Hitachi Microcomputer Engineering Co., Ltd.)

https://doi.org/10.7567/SSDM.1983.A-6-1