A New Encroachment-Free Tungsten CVD Process with Superior Selectivity

1983 Conference on Solid State Devices and Materials

Aug 30, 1983 - Sep 1, 1983
The Tokyo Chamber of Commerce and Industry, Tokyo, Japan

T. Moriya, K. Yamada, Y. Tsunashima, S. Nakata, M. Kashiwagi (1.Toshiba Research and Development Center, Toshiba Corporation)