The Japan Society of Applied Physics

[B-4-8] A CCD Image Sensor Overlaid with An a-Si:H/a-SiC:H Photoconversion Layer

Nozomu Harada、Shinji Uya、Yoshiaki Hayashimoto、Yoshiaki Komatsubara、Kyozou Ide、Okio Yoshida、Takao Kon、Kensaku Yano、Masayuki Kakegawa、Tsunekazu Yoshino (1.Toshiba Research and Development Center、2.Electron Devices Engineering Lab. Toshiba Corporation)

https://doi.org/10.7567/SSDM.1983.B-4-8