The Japan Society of Applied Physics

[B-4-8] A CCD Image Sensor Overlaid with An a-Si:H/a-SiC:H Photoconversion Layer

Nozomu Harada, Shinji Uya, Yoshiaki Hayashimoto, Yoshiaki Komatsubara, Kyozou Ide, Okio Yoshida, Takao Kon, Kensaku Yano, Masayuki Kakegawa, Tsunekazu Yoshino (1.Toshiba Research and Development Center, 2.Electron Devices Engineering Lab. Toshiba Corporation)

https://doi.org/10.7567/SSDM.1983.B-4-8