[B-7-1] A High Resolution CCD Image Sensor Overlaid with an a-Si:H Photoconductive Layer

Shinji Uya, Nozomu Harada, Yoshiaki Hayashimoto, Yukio Endo, Toshikazu Adachi, Okio Yoshida Kyozo Ide, Yoshiaki Komatsubara (1.VLSI Research Center and Electron Devices Lab. TOSHIBA Research and Development Center, 2.Electron Devices Engineering Lab. TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.1984.B-7-1