The Japan Society of Applied Physics

[B-7-1] A High Resolution CCD Image Sensor Overlaid with an a-Si:H Photoconductive Layer

Shinji Uya、Nozomu Harada、Yoshiaki Hayashimoto、Yukio Endo、Toshikazu Adachi、Okio Yoshida Kyozo Ide、Yoshiaki Komatsubara (1.VLSI Research Center and Electron Devices Lab. TOSHIBA Research and Development Center、2.Electron Devices Engineering Lab. TOSHIBA Corporation)

https://doi.org/10.7567/SSDM.1984.B-7-1