[B-9-2] Dynamic Numerical Simulation of Melting and Resolidification Process in SOI Formation by Seeded Lateral Epitaxy

M. Ohkura、M. Ichikawa、M. Miyao、H. Sunami、T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1984.B-9-2