[B-9-2] Dynamic Numerical Simulation of Melting and Resolidification Process in SOI Formation by Seeded Lateral Epitaxy

M. Ohkura, M. Ichikawa, M. Miyao, H. Sunami, T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1984.B-9-2