[B-9-4] Nucleation Control and Epitaxial Alignment in Silicon-on-Insulator Structure during Solid Phase Growth

M. Miyao, M. Moniwa, M. Ichikawa, A. Ishizaka, T. Doi, H. Sunami, T. Tokuyama (1.Central Research Lab., Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1984.B-9-4