[B-9-4] Nucleation Control and Epitaxial Alignment in Silicon-on-Insulator Structure during Solid Phase Growth

M. Miyao、M. Moniwa、M. Ichikawa、A. Ishizaka、T. Doi、H. Sunami、T. Tokuyama (1.Central Research Lab., Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1984.B-9-4