[C-5-3] Al2O3/Native Oxide Double-Layer MIS Structure for InP MISFET IC's

Takayuki Sawada、Hideki Hasegawa、Hideo Ohno、Shin Itagaki (1.Department of Electrical Engineering, Hokkaido University)

https://doi.org/10.7567/SSDM.1984.C-5-3