[C-7-1] Experimental and Theoretical Studies on Short Channel Effects in Lamp-Annealed WSix-Gate Self-Aligned GaAs MESFET's

T. Ohnishi、Y. Yamaguchi、T. Onodera、N. Yokoyama、H. Nishi (1.Fujitsu Laboratories Ltd., Atsugi)

https://doi.org/10.7567/SSDM.1984.C-7-1