[D-9-2] RF CO2 Oxidation and Double-Layer Resist Technique Realizing Josephson Junctions Very Small Ij-Spread

Jun'ichi Nakano, Yoshiaki Mimura, Koichi Nagata, Yuji Hasumi, Takao Waho (1.Atsugi Electrical Communication Laboratory, N.T.T.)

https://doi.org/10.7567/SSDM.1984.D-9-2