[LC-12-6] Three-Dimensional SRAM-Cell Fabricated with a Laser-Recrystallization Technology

Nobuo Sasaki, Seiichiro Kawamura, Takashi Iwai, Motoo Nakano, Kunihiko Wada, Mikio Takagi (1.IC Development Division, Fujitsu Limited)

https://doi.org/10.7567/SSDM.1984.LC-12-6