[LC-12-6] Three-Dimensional SRAM-Cell Fabricated with a Laser-Recrystallization Technology

Nobuo Sasaki、Seiichiro Kawamura、Takashi Iwai、Motoo Nakano、Kunihiko Wada、Mikio Takagi (1.IC Development Division, Fujitsu Limited)

https://doi.org/10.7567/SSDM.1984.LC-12-6