[LD-5-2] A New OEIC Fabrication Technique - Graded-Step Process - Applied to an AlGaAs/GaAs Monolithic Laser/FET

O. Wada、T. Sanada、H. Machida、S. Yamakoshi、H. Hamaguchi、T. Fujii、T. Horimatsu、T. Sakurai (1.Fujitsu Limited)

https://doi.org/10.7567/SSDM.1984.LD-5-2