[LD-5-2] A New OEIC Fabrication Technique - Graded-Step Process - Applied to an AlGaAs/GaAs Monolithic Laser/FET

O. Wada, T. Sanada, H. Machida, S. Yamakoshi, H. Hamaguchi, T. Fujii, T. Horimatsu, T. Sakurai (1.Fujitsu Limited)

https://doi.org/10.7567/SSDM.1984.LD-5-2