[A-1-3] Characterization and Performance Analysis of Masked LDD Transistor for CMOS VLSIs

Masaki Sato, Kuniyoshi Yoshikawa, Shigeru Atsumi, Seiichi Mori, Koji Makita, Akemi Omichi, Hiroshi Nozawa (1.Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)

https://doi.org/10.7567/SSDM.1985.A-1-3