[A-1-3] Characterization and Performance Analysis of Masked LDD Transistor for CMOS VLSIs

Masaki Sato、Kuniyoshi Yoshikawa、Shigeru Atsumi、Seiichi Mori、Koji Makita、Akemi Omichi、Hiroshi Nozawa (1.Semiconductor Device Engineering Laboratory, TOSHIBA CORPORATION)

https://doi.org/10.7567/SSDM.1985.A-1-3