[A-1-4] A New Self-Aligned Contact Technology for LDD MOS Transistors

A. Shinohara、M. Fukumoto、G. Fuse、S. Odanaka、M. Sasago、T. Ohzone、T. Ishihara (1.Semiconductor Research Center Matsushita Electric Ind. Co., Ltd.)

https://doi.org/10.7567/SSDM.1985.A-1-4