[A-1-6] Three Dimensional Leakage Current in Corrugated Capacitor Cells

Eiji TAKEDA, Kan TAKEUCHI, Atsushi HIRAIWA, Toru TOYABE, Hideo SUNAMI, Kiyoo ITOH (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1985.A-1-6