[A-1-6] Three Dimensional Leakage Current in Corrugated Capacitor Cells

Eiji TAKEDA、Kan TAKEUCHI、Atsushi HIRAIWA、Toru TOYABE、Hideo SUNAMI、Kiyoo ITOH (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1985.A-1-6