[A-2-3] Crystal Orientations for Unseeded SOI Films Recrystallized by a mm Long CW Line-Source Electron Beam

H. HADA、S. SAITOH、H. OKABAYASHI (1.Microelectronics Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1985.A-2-3