[A-2-4] Orientation Controlled SOI by Line-Shaped Laser-Beam Seeded Lateral Epitaxy for CMOS Stacking

M. Ohkura, K. Kusukawa, H. Sunami, T. Tokuyama (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1985.A-2-4