[A-4-7] A New Isolation Technology for VLSI

K. Nojiri、K. Tsunokuni、K. Hirobe、A. Koike、K. Ito、S. Kishino (1.Musashi Works, Hitachi, Ltd.、2.Device Development Center, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1985.A-4-7