[A-4-7] A New Isolation Technology for VLSI

K. Nojiri, K. Tsunokuni, K. Hirobe, A. Koike, K. Ito, S. Kishino (1.Musashi Works, Hitachi, Ltd., 2.Device Development Center, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1985.A-4-7